FEI Strata 400 Dual Beam


FEI Strata 400

The Strata 400 DualBeam system is a fully digital Field Emission Scanning Electron Microscope (FE-SEM) equipped with Focused Ion Beam (FIB) technology. It allows for high-throughput cross-sectioning and automated TEM sample preparation. The key enabling technologies are all integrated onto a single platform such as:


- Ultra-high resolution electron optics (magnetic immersion lens with ultra-high  brightness Sirion emitter) with SE and BSE in-lens detection and optional STEM  imaging

- High-resolution (field emission) Ion Optics (Sidewinder? column)
- Advanced control of Gas Chemistries including FEI proprietary gasses such as  Delineation Etch or Selective Carbon Mill
- High-precision specimen stage with 100 mm travel along the x and y axes, and  integrated loadlock
- A high-resolution 4k digital patterning engine
- Automation with full access to E-beam, I-beam, patterning and gas chemistry  functionality
- A Windows 2000 4-quadrant “Beam per Quad” User Interface
- Manual user interface and joystick
- System architecture is optimized for automation, which is either optionally  available (e.g. AutoFIB, AutoTEM, AutoSlice and View) or custom-made to suit  your particular application needs.
- Designed for SEMI S2 and CE compliance
 Features and specifications:
Geometry
On a 21-port specimen chamber the electron and ion column are mounted at 52 degrees to each other. The beam coincidence point is at 5 mm working distance, which is also the eucentric working distance of the stage and the analytical working distance. There are 5 GIS-ports grouped around the ion column.
Vacuum
The Strata 400 uses a vacuum system, which is entirely oil-free including an Edwards XDS10 scroll pump. Differential pumping on the electron column ensures tip operation at the ultra-high vacuum levels (10-10 mbar) even with a controlled gas flow in the specimen chamber.
Sample navigation
The Strata 400 is equipped with a 5-axes motorized x-y-z-rotate-tilt stage. Travel along the x and y-axis is 100 mm, the tilt range is –10 to 60 degrees. The motorized z-range is 20 mm. Stage repeatability in x,y is 0.5 μm (average of absolute values), at 0° and 52° tilt.
Sample holders included
- Multi-stub holder (includes pre-tilt mounts), loads through loadlock
- Plate for mounting multiple packages or wafer pieces (mounts onto multi-stub  holder)
- Single stub mount, mounts directly onto stage
- FIB/TEM Specimen kit (with two TEM grid holders and a sample loading base)
 Electron optics
 Magnetic immersion lens electron optics with ultra-high brightness Sirion  emitter.
- Source: Schottky field emitter, Sirion type
- Source lifetime: 1 year guaranteed
- Voltage: 200 V to 30 kV, continuously adjustable
- Beam current: < 20 nA
- Resolution: 1.0 nm @ 15 kV, 2.5 nm (1.9 nm achievable) @ 1 kV (< 68 dBC,  sample on stub mount)
- Detection: in-lens SE and BSE
 Ion optics
 Sidewinder? field emission focused ion beam optics with liquid Gallium ion  emitter.
- Source lifetime: 1000 hours
- Voltage: 2 kV to 30 kV, with enhanced low-kV performance
- Beam current: 20 nA in 15 steps
- Resolution: 7.0 nm @ 30 kV
- Detection: secondary and secondary ion (CDEM detector)
 Scanning system
High-resolution digital scanning engine controlled from the User Interface.
- Resolution: 512x442, 1024x884, 2048x1768, 3584x3094 pixels
 Certified
- Minimum Dwell Time: 50 ns/pixel

- Electronic scan rotation by n x 360 degrees
Patterning system
High-resolution digital patterning engine controlled from the User Interface
- Maximum resolution: 4k x 4k x 8 bit
- Minimum Dwell Time: 100 ns/pixel
- Maximum Dwell Time: 4 ms/pixel
- Multiple pattern shapes
- Variable dwell time pattern to give 3D milling
- Complex milling patterns through Bitmap import
Detection
The Strata 400 features in-lens SE and BSE detection for high-resolution imaging at both high and low kV’s, as well as an Everhart-Thornley SE detector for conventional SE detection, and CDEM detector for SE and secondary ion imaging. An integrated IR-CCD camera is standard for in-chamber viewing.
Imaging
Images are displayed in an area of 1024 x 884 pixels, configurable for single frame display or 4-quadrant display. Images can be viewed live, averaged or integrated. Images can be saved in TIFF, BMP or JPEG file formats, and in 8-bit or 16-bit depth, to the hard disk or LAN from the graphical user interface. Image printing is also available from the user interface.
Patterning
Predefined patterns can be drawn in overlay in any of the four quadrants in the UI. Progress of the patterning is monitored in the User Interface through a progress bar. End-point detection is available through a specimen current graph and a real-time monitor. Simultaneous imaging and patterning is a standard feature of the Strata 400.
System control
The Strata 400 is controlled from a Windows 2000 Graphical User Interface running at 1280 x 1024 screen resolution on a dedicated microscope controller. A support computer is standard on the system for software utilities that could interfere with the control software running on the controller (e.g. LAN connection). The system includes two 19-inch LCD monitors, an optical mouse and a height-adjustable office desk. The two computers are controlled with a single keyboard and mouse using an automatic switch box (“MagicSwitch”). A manual user interface allows for hands-on control of focus, stigmation, magnification, XY fine position, and contrast/brightness in addition to standard mouse control. The stage can be controlled through the user interface or by a standard included joystick.



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